Chotest Laser Interferometer Measurement System SJ6000

Technical data and information

System parameters:
1. Measuring method: single frequency
2. Laser frequency accuracy: 0.05ppm
3. Dynamic capture rate: 50kHz
4. Warm-up time: about 6 min
5. Operating temperature: (0-40)℃
6. Environment temperature: (0-40)℃, humidity: 0-95%
7. Storage temperature: -20℃-70℃
Environmental sensors:
1. Atmospheric temperature sensor : ±0.1℃ (0-40)℃, resolution: 0.01℃
2. Material temperature sensor: ±0.1℃ (0-40)℃, resolution: 0.01℃
3. Atmospheric humidity sensor: ±5% (0-95%)
4. Atmospheric pressure sensor: ±0.1kPa (65～115)kPa
Linear measurement:
1. Measuring range: (0-80)m
2. Measuring accuracy: 0.5ppm (0-40)℃
3. Measuring resolution: 1nm
4. Maximum measuring speed: 4m/s
Angle measurement:
1. Axial range: (0-15)m
2. Measuring range: ±10°
3. Accuracy: ±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″; M is measured length in m)
4. Measuring resolution: 0.1″
Flatness measurement:
1. Axial range: (0-15) m
2. Flatness measuring range: ±1.5 mm
3. Accuracy: ±(0.2%R+0.02M²) μm (R is indicating value in μm; M is measured length in m)
4. Substrate size: 180mm adjustable, 360mm adjustable
5. Measuring resolution: 0.1μm
Straightness measurement:
Item	Axis range	Measuring range	Accuracy	Resolution
Short straightness	(0.1-4)m	±3.0mm	±(0.5+0.25%R+0.15M²)μm	0.01μm
Long straightness	(1-20)m	±3.0mm	±(5.0+2.5%R+0.015M²)μm	0.1μm
Note: R is indicating value in μm; M is measured length in meters
Perpendicularity measurement:
Item	Axis range	Measuring range	Accuracy	Resolution
Short perpendicularity	(0.1-3)m	±3.0mm	±(2.5+0.25%R+0.8M)μm/m	0.01μm
Long perpendicularity	(1-15)m	±3.0mm	±(2.5+2.5%R+0.08M)μm/m	0.01μm
Note: R is indicating value in μm; M is measured length in meters
Rotary axis measurement:
1. Measuring range of angle: 0-360°
2. Max axis rotation speed: 10rpm
3. Pitch accuracy of precision turntable: ±1″
4. Resolution: 0.1″

Product descriptions

Laser interferometer is recognized as a high precision, high sensitive measuring method by applying light wavelength as criterion, and is widely used in high-end manufacturing domain.

SJ6000 laser interferometer insists of high-frequency Helium-Neon laser generator from a USA supplier, high-precision environmental compensation modules, high-precision laser interference signal processing system, high-performance computer control system. By applying with thermal frequency stabilization technology of laser dual-longitudinal mode and geometric parameters interference optical path design, SJ6000 can output long-term stable and high-precision (0.05 ppm) laser quickly (about 6 minutes) which has powerful anti-interference performance. With different prism modules, it can measure linearity, angle, straightness, Flatness and perpendicularity, in addition it can analyze dynamic characteristics.

SJ6000 has many advantages, such as high precision, high speed, high resolution, long range.